inFurner

HIGH VACUUM FURNACE

 by AMAZEMET

COMPACT SOLUTION
FOR EVERY LABORATORY

ALL PERIPHERAL
DEVICES ENCLOSED IN
ONE, DESK-SIZED
CASING

FURNACE
EXACTLY
AS YOU
NEED IT

HOT ZONE DIMENSIONS MAY VARY FROM 120 TO 200 mm IN DIAMETER AND FROM
100 TO 200 mm IN HEIGHT

YOU CAN CHOOSE BETWEEN HEATING PARTS MADE OF MOLYBDENUM, TANTALUM OR TUNGSTEN, ALLOWING TEMPERATURE TO REACH  1600 ºC WITH ΔT<2 ºC

FURNACE IS READY TO FEATURE EITHER DIFFUSION, TURBOMOLECULAR OR ION VACUUM PUMP PROVIDING PRESSURES RANGING FROM 3×10-5 to 3×10-9 mbar

EVERYTHING UNDER CONTROL
ANYWHERE
YOU ARE

g

PROGRAMMABLE CUSTOM HEAT TREATMENT CYCLES

FURNACE CONTROL VIA TOUCH PANEL

PROCESS PARAMETERS SELF-MONITORING FOR SAFETY PURPOSES

+

ON-LINE DATA TRANSFER

PROCESS RECORDING

AVAILABLE SETUPS AND FEATURES

Heating system

  • Molybdenum (Max. temp. 1200 °C)
  • Tantalum (Max. temp. 1600 °C)

Process gas system

  • High Pressure Gas Quenching (HPGQ) up to 100 [°C/min]
  • Available gases: Ar; He
  • Mass flow controller (Ar)
  • Gas flow maintenance in the working chamber

Furnace instrumentation

  • Electronic display of furnace parameters:
    – Pressure
    – Temperature
    – Valves’ position status
    – Furnace devices’ status
  • Residual oxygen sensor

Vacuum

Low

  • Oil rotary vane pump – 3×10-3 [mbar]
  • Dry scroll pump – 7×10-3 [mbar] – e.g. for treatment of semiconductors

High

  • Diffusion pump – 3×10-6 [mbar] with LN2 cooling up to 8×10-8 [mbar]
  • Turbomolecular pump – 9×10-8 [mbar]
  • Ion pump – 3×10-9 [mbar] – for treatment of semiconductors

Cooling

  • Water cooler – 4,6 kW
  • Water chiller – 3 / 10,4 / 28 kW
  • Liquid nitrogen for diffusion pump

Process management

  • Control panel
  • Process recording
  • Remote access to the furnace parameters
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AMAZEMET Sp. z o. o. [Ltd.]

Al. Jana Pawła II 27

00-867 Warsaw

Poland

PHONE:

+48 573 481 303

E-MAIL:

office@amazemet.com

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IN PARTNERSHIP WITH

AMAZEMET Sp. z o. o. | Al. Jana Pawła II 27, 00-867 Warszawa, Polska | Sąd Rejonowy dla M. St. Warszawy w Warszawie, XII Wydział Gospodarczy Krajowego Rejestru Sądowego | KRS 0000780516, NIP 9512482142, REGON 383017558 | Kapitał zakładowy – 26 250 PLN (opłacony w całości)